Design of Piezoelectric Aluminum Nitride MEMS Resonator
نویسندگان
چکیده
The following work reports the design, numerical, analytical and simulation characterization of an Aluminum Nitride MEMS resonator. The paper offers a comparison of rectangular plate MEMS resonator (length extensional and width extensional mode shapes) and ring shape MEMS resonator. It also demonstrates the contour Eigen modes of resonators and their equivalent electric circuit model (BVD). Furthermore, an overview of a band pass filter that can be enabled by mechanical coupling of these counter mode resonators is briefly presented. Keywords— MEMS resonator, Contour mode, Electromechanical coupling, Aluminum Nitride, Tethers.
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